关键词: 压电执行器, 粘滑驱动, 步进式, 精密, 压电陶瓷

Abstract:

A precision rotary piezoelectric actuator based on stick-slip principle driving was studied. Using a decussate type flexure hinges, the linear displacements of the two piezoelectric ceramic components can be transformed into angular displacement. Then the stick-slip motion can be achieved utilizing the frictional contact between the rotor and the stator. Under the actuation of sawtooth wave voltage signals, the proposed piezoelectric actuator can generated rotary motions with long range and high resolution. The configuration and the working principle of the piezoelectric actuator were introduced in detail. The motion of the piezoelectric actuator was also analyzed. The working performance of the actuator prototype was tested by the established experimental system.

Key words: piezoelectric actuator, stick-slip driving, stepping, precision, piezoelectric ceramic