关键词: 超声波电动机, 压电振子, 纵振, 弯振, 有限元模型

Abstract: A single driving foot ultrasonic motor using longitudinal-bending modal was studied, the poling direction and circuit connection of the piezoelectric vibrator were designed. The sensitivity analysis of the ten structure parameters of the single driving foot ultrasonic motor using longitudinal bending modal was carried out. The impacts of different parameters on the longitudinal vibration mode, bending vibration mode and frequency difference of the motor were obtained. The longitudinal mode and the bending mode were merged, and structural parameters were optimized.

Key words: ultrasonic motor (USM), piezoelectric vibrator, longitudinal vibration, bending vibration, finite element model