NEMS外场驱动微电机研究进展

doi:1004-7018-47-3-77

摘要/Abstract

摘要：

按照外场驱动微电机的驱动机制进行分类,简要介绍了各类微电机的制造工艺及应用前景,综述了各类微电机的研究与应用现状。指出了当前外场驱动微电机领域的研究热点,分析了微电机在实际应用中存在的困难。展望了外场驱动微电机未来的发展趋势及应用前景。

关键词: 微纳米电机, 纳机电系统, 外场驱动, 微电机, 发展趋势, 应用前景

Abstract:

According to the drive mechanism of the micromotor driven by the external field, the classification and the manufacturing process and application prospect of various micromotors were briefly introduced. The research and application status of various micromotors were summarized. The current research hotspots of micro-motor driven by the external field were pointed out, and the difficulties in the practical application of the micro-motor were analyzed. The future development trend and application prospects of field-driven micromotors were forecasted.

Key words: micro nano motor, nano electro mechanical system (NEMS), external field driven, micro motor, development trend, application prospect

中图分类号:

TM359.9

曹富林,许立忠. NEMS外场驱动微电机研究进展[J]. 微特电机, 2019, 47(3): 77-81.

Fu-lin CAO,Li-zhong XU. Advances in Research of NEMS Field-Driven Micromotors[J]. Small & Special Electrical Machines, 2019, 47(3): 77-81.

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