基于音圈电机驱动的纳米级空气静压工作台设计

基于音圈电机驱动的纳米级空气静压工作台设计

赵鹏飞, 钱程, 钱翰琪

Design of Nano-Scale Aerostatic Worktable Driven by Voice Coil Motor

ZHAO Peng-fei, QIAN Cheng, QIAN Han-qi

微特电机 . 2021, (1): 29 -31 .