NEMS外场驱动微电机研究进展

NEMS外场驱动微电机研究进展

曹富林,许立忠

Advances in Research of NEMS Field-Driven Micromotors

Fu-lin CAO,Li-zhong XU

微特电机 . 2019, (3): 77 -81 . DOI: 1004-7018-47-3-77