关键词: 精粗双层绕组磁悬浮平面电机, 线圈厚度, 铜耗方程

Abstract: The new fine-coarse double-layer winding maglev planar motor ( FCDLWMPM) utilizes the lower coil near the magnet to generate acceleration thrust, and the upper coil far from the magnet to ensure uniform motion accuracy, which can balance the continuously improving acceleration and accuracy requirements of lithography motion. The copper loss and harmonic force generated by high acceleration motion of FCDLWMPM will affect system accuracy, and coil thickness is a key design parameter that affects copper loss and harmonic force. Modeling of electromagnetic force and copper loss of FCDLWMPM was conducted, and the electromagnetic structure and working mode of FCDLWMPM were introduced. Based on the harmonic model of the permanent magnet array magnetic field and Lorentz ’ s law, the single coil electromagnetic force was analyzed and solved. The electromagnetic force equations of the upper and lower coil arrays under DQ decoupling control were derived, and the motor copper loss equation and harmonic force proportion function under photolithography motion were  obtained. The thickness parameter values of the upper and lower coils were solved to obtain the influence of the thickness of the double-layer winding on the proportion of copper loss and harmonic force. The selection of the thickness parameter of the double-layer winding was discussed to effectively reduce the proportion of copper loss and harmonic force.

Key words: fine-coarse double-layer winding maglev planar motor ( FCDLWMPM ), coil thickness, copper consumption equation