关键词: 直线超声波电动机, 灵敏度, 微型化

Abstract:

To improve the existing linear ultrasonic motor,a novel linear ultrasonic motor which was based on piezoelectric stack was proposed, and the motor had the characteristics of low drive voltage, simple structure and convenient assembly. The piezoelectric stack used in the motor was completed by independent design. The symmetric and anti-symmetric mode were utilized as operating modes. The finite element method was used to analyze the symmetric and anti-symmetric mode frequency to all structure parameters in ANSYS software and the frequency consistency of the symmetric and anti-symmetric mode was adjusted. The mode testing showed that the experimental results were consistent with the theoretical results. The performance testing of the motor showed that the motor could offer the maximum velocity of 30 mm/s and the maximum thrust force of 2.2 N in the condition of driving voltage 15 V, frequency 38 kHz. After miniaturization improvement,the maximal thrust force per unit weight of the motor was increased from 97 N/kg to 157 N/kg.

Key words: linear ultrasonic motor, sensitivity, miniaturization